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基于分子动力学的双材料薄膜导热性能研究

发表时间:2009-08-15  浏览量:1347  下载量:588
全部作者: 林美惠,陈敏华,陈云飞
作者单位: 东南大学机械工程学院;东南大学微电子机械系统教育部重点实验室
摘 要: 采用非平衡态分子动力学(molecular dynamic, MD)方法研究双材料薄膜的热传导性能,重点讨论了薄膜厚度、模拟区域温度对薄膜导热系数与界面热阻的影响。模拟结果表明:不同势阱常数比组成的双材料薄膜的热导率均随膜厚的增加而增加;而界面热阻先是随膜厚的增加而以较大的斜度增长,而后趋于平缓增长,当膜厚增加到128 UC以后界面热阻却随膜厚的增加而减小。在40~60 K模拟范围内,不同势阱常数比组成的薄膜导热系数随温度的变化趋势不同,其界面热阻随温度的增大而减小。
关 键 词: 热学;导热系数;界面热阻;非平衡态;分子动力学
Title: Study on thermal property of bi�material films based on molecular dynamic simulation
Author: LIN Meihui, CHEN Minhua, CHEN Yunfei
Organization: School of Mechanical Engineering, Southeast University;Key Laboratory of Micro Electromechanical System of Education Ministry, Southeast University
Abstract: The thermal property of bi�material films was studied using non�equilibrium molecular dynamic simulation method. The paper focuses on studying the effects of the film thickness and the regular temperature on the thermal conductivity and the interface thermal resistance of the bi�material films. The simulation results demonstrate that the thermal conductivity of the films formed by materials with different potential constant ratios increases with the films thickness, while their interface thermal resistance increases firstly and then decreases when the film thickness is greater than 128 UC. In the temperature range of 40~60 K, the thermal conductivity of the films with different potential constant ratios have different change trends with the increase of temperature, while the corresponding interface resistance decreases with the increase of temperature.
Key words: calorifics; thermal conductivity; interface thermal resistance; non�equilibrium; molecular dynamic
发表期数: 2009年8月第15期
引用格式: 林美惠,陈敏华,陈云飞. 基于分子动力学的双材料薄膜导热性能研究[J]. 中国科技论文在线精品论文,2009,2(15):1612-1617.
 
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