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掩板法构筑有序纳米阵列结构及其光学性质研究

发表时间:2017-07-13  浏览量:64  下载量:8
全部作者: 常玲霞,叶顺盛,王宏禹,张俊虎
作者单位: 吉林大学化学学院超分子结构与材料国家重点实验室
摘 要: 结合胶体晶体和O2反应离子刻蚀(reactive ion etching,RIE)技术,通过膜转移的方法在聚甲基丙烯酸甲酯(polymethylmethacrylate,PMMA)/玻璃基底上成功制备了金多孔膜掩板。利用该掩板制备出不同形貌的有序贵金属纳米阵列结构。通过HF溶液刻蚀玻璃基底的方法,实现了金多孔膜掩板的转移,在很大程度上解决了传统膜转移过程中容易出现褶皱和破裂的问题。该掩板法用同一个模板,通过改变刻蚀时间和金属材料的热沉积角度,分别制备出了不同结构尺寸Ag纳米圆盘阵列结构、Ag纳米柱阵列结构和Ag纳米双月牙阵列结构,并研究其参数的改变对表面等离子共振吸收峰的影响。另外,该方法可以制备复合材料的纳米阵列结构,如Ag-SiO2-Ag三明治夹层结构等。
关 键 词: 高分子化学;纳米结构;掩板法;表面等离子共振
Title: Fabrication of ordered nanostructures by mask method and its optical property study
Author: CHANG Lingxia, YE Shunsheng, WANG Hongyu, ZHANG Junhu
Organization: State Key Laboratory of Supramolecular Structure and Materials, College of Chemistry, Jilin University
Abstract: The mask of gold porous film was successfully prepared on a polymethylmethacrylate (PMMA)/glass substrate by membrane transfer using colloidal crystals and O2 reactive ion etching (RIE) techniques. Highly ordered nanostructure arrays with different morphologies were fabricated by the mask method. Etching the glass substrate with HF solution realized the transfer of the gold porous film mask, which solved the problem of wrinkling and rupturing in the traditional membrane transfer process greatly. The Ag nanodiscs array, Ag nanopillars array and Ag di-nanocrescents arrays were constructed by changing the etching time and the thermal deposition angle of the metal material utilizing the same template. The influences of changing its parameters on the surface plasmon resonance absorption peak were studied. In addition, this mask method can be used to fabricate nanostructures of composite, such as Ag-SiO2-Ag sandwich structure.
Key words: polymer chemistry; nanostructure; mask method; surface plasmon resonance (SPR)
发表期数: 2017年7月第13期
引用格式: 常玲霞,叶顺盛,王宏禹,等. 掩板法构筑有序纳米阵列结构及其光学性质研究[J]. 中国科技论文在线精品论文,2017,10(13):1473-1481.
 
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