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子孔径拼接干涉检测光学平面方法的研究
发表时间：2009-03-31 浏览量：2445 下载量：1143
| 全部作者： | 田义，李洪玉，王月珠 |
| 作者单位： | 哈尔滨工业大学光电子技术研究所可调谐激光技术国家级重点实验室；哈尔滨工业大学空间光学工程研究中心 |
| 摘 要： | 为实现小口径干涉仪完成较大口径光学平面镜片的测试，得到光学镜片的完整面形信息，建立了子孔径拼接模型。讨论了检测过程及拼接过程中的倾斜量对拼接结果的影响，同时建立了消除倾斜量的模型并对该模型进行实验计算验证。充分利用Matlab软件强大的矩阵运算能力和与Zygo干涉仪匹配的MetroPro软件处理技术，对外径为150 mm，内径为100 mm的镜片进行五孔径拼接检测实验，对比全口径干涉检测结果，峰峰（PV）值和方均值（rms）值的相对误差分别为1.05%和2.10%.实验结果证明：该方法稳定可靠，可以为大口径镜面的加工与检测提供理论支持。 |
| 关 键 词： | 仪器仪表技术；面形测量；子孔径拼接；Zygo干涉仪 |
| Title： | Research on subaperture stitching interferometer method for measuring optical plane |
| Author： | TIAN Yi, LI Hongyu, WANG Yuezhu |
| Organization： | National Key Laboratory of Tunable Laser Technology, Institute of Opto-Electronic, Harbin Institute of Technology；Space Optical Engineering Research Center, Harbin Institute of Technology |
| Abstract： | In order to obtain the whole lens’ surface shape information, measurement of larger diameter optical plane was implemented by using smaller caliber interferometer. Subaperture stitching mathematical model was established. The influence to the stitching result was discussed. One main reason was the tilt and piston in the measuring process and the stitching process. The removing tilt and piston mathematical model was established, and then the model was verified experimentally. Fully utilizing the Matlab software’s matrix operation ability and the MetroPro software data processing technology which matched with the Zygo interferometer, a lens of 150 mm in outer diameter, 100 mm in inside diameter was used in five sub-apertures stitching experiment. Compared with full caliber interference measurement results, the relative error value of PV is 1.05%, and the relative error value of rms is 2.10%. Experimental results indicate that this method is stable, reliable, and may provide the theory support for the large caliber mirror surface’s process and measurement. |
| Key words： | instrument technology; surface shape measurement; subaperture stitching method; Zygo interferometer |
| 发表期数： | 2009年3月第6期 |
| 引用格式： | 田义，李洪玉，王月珠. 子孔径拼接干涉检测光学平面方法的研究[J]. 中国科技论文在线精品论文，2009，2（6）：633-639. |
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