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热处理对TiSixNy超硬涂层结构及性能的影响
发表时间：2011-05-15 浏览量：1575 下载量：516
| 全部作者： | 陆永浩，王俊平，李明星，陶诗龙 |
| 作者单位： | 北京科技大学国家材料服役安全科学中心；北京建筑工程学院理学院；长庆油田公司油气工艺技术研究院 |
| 摘 要： | 采用四靶（2个Ti靶和2个Si靶）非平衡磁控溅射沉积工艺，在氮氩混合气氛和500℃基片温度下，通过调节Si靶溅射电流在M42钢基体上沉积得到了具有不同Si含量的TiSixNy硬质涂层。这些薄膜随后在500，600，700，800，900℃下进行真空热处理。使用X-射线衍射（X-ray diffraction，XRD）、微米硬度仪、划痕仪研究热处理对涂层的组织结构、力学性能和膜基附着力的影响。研究结果表明：900℃及以下温度真空热处理对薄膜的组织、力学性能等影响不大，但对钢基体的组织和性能则有较大的影响。随着真空退火温度的提高，薄膜附着力小幅增加后急剧减小，600℃时薄膜的附着力最大。摩擦实验表明：TiSixNy薄膜的摩擦系数随着Si含量的增加而略微下降，不同Si含量薄膜的摩擦系数介于0.352～0.404之间；900℃及以下温度真空热处理对薄膜的摩擦系数影响不大。 |
| 关 键 词： | 材料物理与化学；TiSixNy；纳米复合；热处理；显微结构；附着力 |
| Title： | Effect of annealing treatment on the microstructure and properties of TiSixNy superhard coatings |
| Author： | LU Yonghao, WANG Junping, LI Mingxing, TAO Shilong |
| Organization： | National Center for Materials Service Safety, University of Science & Technology Beijing; School of Science, Beijing University of Civil Engineering and Architecture; Oil & Gas Technology Research Institute, Changqing Oilfield Company |
| Abstract： | In this study, a series of TiSixNy superhard coatings with different Si contents were prepared on M42 steel substrates using 2 Ti and 2 Si targets by reactive magnetron sputtering at 500℃ in nitrogen-argon mixed atmosphere. These samples were subsequently vacuum-annealed at 500, 600, 700, 800 and 900℃, respectively. X-ray diffraction (XRD), microindenter and scratch tester were applied to investigate the microstructure, mechanical behaviors and adhesion property of as-deposited and annealed samples. The results indicated that annealing treatment below 900℃ played a little role in microstructure and mechanical behaviors of the coatings, however greatly affected the microstructure and mechanical behaviors of steel substrates. The film-substrate adhesive force was slightly increased, followed by abrupt decrease with increasing annealing temperature. Its value got to the maximum at 600℃. The friction coefficient was slightly decreased with increase of Si content. Its value varied in the range of 0.352-0.404. Annealing below 900℃ had less effect on the friction coefficient. |
| Key words： | materials physics and chemistry; TiSixNy; nanocomposite; annealing; microstructure; adhesive force |
| 发表期数： | 2011年5月第9期 |
| 引用格式： | 陆永浩，王俊平，李明星，等. 热处理对TiSixNy超硬涂层结构及性能的影响[J]. 中国科技论文在线精品论文，2011，4（9）：791-797. |
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