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阳极键合电流-时间特性模型的建立及温度对电流曲线的影响
发表时间：2017-10-31 浏览量：2369 下载量：488
| 全部作者： | 潘明强，孙立宁，刘吉柱，王阳俊，郭浩 |
| 作者单位： | 苏州大学机电工程学院&苏州纳米科技协同创新中心，机器人与微系统研究中心 |
| 摘 要： | 键合的形成与外部宏观键合电流具有很强的协同一致性，键合电流可以间接地反映出键合的状态，而键合电流的大小主要依赖于键合温度。为获得温度对键合的具体影响因素，实现对键合的有效调控，搭建阳极键合系统，建立键合电流-时间特性模型，研究温度对键合的影响。首先，搭建键合系统和测试系统，分析阳极键合的基本过程，通过引入漏电系数对键合过程电学模型化，建立键合电流-时间特性模型，然后利用试验分析方法获得了键合玻璃电导率和漏电系数两个关键参数，最后利用模型分析温度对键合最大、最小电流及电流曲线的影响，并进行试验验证。结果表明，利用所建立的电流-时间特性模型获得的键合最大、最小电流随温度的变化规律与试验结论一致，偏差均值分别为2.28%、0.32%，均小于同参数下试验最大、最小电流之间的偏差均值；模型计算电流曲线与试验曲线的重合度均值大于0.87，近似于同参数下不同次试验电流曲线的重合度均值。 |
| 关 键 词： | 非金属加工工艺；微纳制造；阳极键合；电流模型；温度 |
| Title： | Model establishment of the anodic bonding current-time characteristic and effect of temperature on the current curve |
| Author： | PAN Mingqiang, SUN Lining, LIU Jizhu, WANG Yangjun, GUO Hao |
| Organization： | Robotics and Microsystem Center, College of Mechanical and Electrical Engineering & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University |
| Abstract： | There appears to be a distinct relationship between the bonding formation and the external current, and the bonding external current indirectly reflects the bonding state. And the magnitude of the bonding external current peak depends strongly on the bonding temperature. To obtain the effect of the temperature on anodic bonding and realize the effective controlling of bonding, this paper built the anodic bonding system and established the bonding external current-time characteristic model. First, anodic bonding system and test system were set up. Then, the basic process of anodic bonding and the established bonding external current-time characteristic model were analyzed by introducing the leakage coefficient for electro-modeling the bonding process. And the glass conductivity and leakage coefficient were obtained by using the experimental analysis method. At last, the effect of the temperature on the bonding external current peak and current curves was analyzed by using current-time model, which was validated by experiment. The results show that the maximum and minimum value variation of current with the temperature obtained from the model are agreed with the experimental results, and the mean deviations are 2.28%, 0.32%, respectively, which are less than the mean deviation between the experimental values in the same parameters. And the mean coincidence degree between the calculation current curve and experimental current curve is more than 0.87, which is similar to the mean coincidence degree among repeated experimental current curves. |
| Key words： | non-metallic processing technology; micro-nano manufacturing; anodic bonding; current model; temperature |
| 发表期数： | 2017年10月第20期 |
| 引用格式： | 潘明强，孙立宁，刘吉柱，等. 阳极键合电流-时间特性模型的建立及温度对电流曲线的影响[J]. 中国科技论文在线精品论文，2017，10（20）：2210-2218. |
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