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厚度对La0.9Sr0.1MnO3/Si薄膜结构的影响

发表时间:2008-04-15  浏览量:1646  下载量:589
全部作者: 黄春奎,苏庆,徐金海,兰伟,刘雪芹
作者单位: 兰州大学物理科学与技术学院
摘 要: 通过溶胶 凝胶旋涂方法在Si(100)上制备了不同厚度的La0.9Sr0.1MnO3(LSMO)薄膜,利用X射线衍射(XRD)、共焦显微拉曼散射(Raman)研究了LSMO/Si(100)薄膜的微结构。研究结果表明90 nm厚的LSMO薄膜具有正交相结构,当厚度大于150 nm时,薄膜具有菱方相结构。150 nm厚的薄膜Raman图谱中,490 cm-1和602 cm-1正交结构中的Jahn-Teller特征峰和670 cm-1附近菱方相中MnO6八面体的反对称伸缩模式振动特征峰非常明显,有两相共存现象。随着薄膜厚度的增加,薄膜的晶格常数发生变化,a增大、c减少。这是由于在较厚的薄膜中,相邻MnO6八面体间的夹角变大,Mn-O键长增长。通过使用532 nm和325 nm波长的激光Raman散射证实,LSMO/Si薄膜具有两相共存的现象,由于LSMO和Si衬底间晶格失配,衬底与薄膜的界面处产生了应力,薄膜具有在衬底与薄膜的界面处为正交相,表面为菱方相的双层结构。
关 键 词: 凝聚态物理;La1-xSrxMnO3;薄膜;共焦显微拉曼散射;微结构
Title: Thickness dependent microstructure of La0.9Sr0.1MnO3/ Si films
Author: HUANG Chunkui, SU Qing, XU Jinhai, LAN Wei, LIU Xueqin
Organization: School of Physical Science and Technology, Lanzhou University
Abstract: La0.9Sr0.1MnO3 film on Si(100) substrate with a variety of thickness was prepared by sol-gel routine, and the microstructure of LSMO/Si was studied by XRD and confocal micro Raman spectroscopy technology. Both XRD and Raman results show different structure of LSMO film with different thickness. There are two strong peaks around 490 cm-1 and 602 cm-1 that is characteristic of Jahn-Teller distortion in spectra and characteristic peak of rhombohedral structure of the film with thickness of 90 nm that show coexistence of two phases. Lattice constants of LSMO film vary with film thickness. Lattice constants vary as film thickness increased, which is because the tilting angle of MnO6 octahedron and the bond length of Mn-O increase as film thickness increasing. As the results of Raman spectra of 532 nm laser and 325 nm laser show, there are two phase exist in LSMO/Si film, that is orthorhoderal in LSMO/Si interface, but rhombohedral in surface.
Key words: condensed matter physics; La1-xSrxMnO3; thin film; confocal micro-Raman spectroscopy; microstructure
发表期数: 2008年8月第7期
引用格式: 黄春奎,苏庆,徐金海,等. 厚度对La0.9Sr0.1MnO3/Si薄膜结构的影响[J]. 中国科技论文在线精品论文,2008,1(7):729-734.
 
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