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脉冲激光烧蚀制备纳米Si晶粒的动力学研究

发表时间:2010-08-15  浏览量:1475  下载量:718
全部作者: 李红伟,苏威,滕爱萍,王英龙
作者单位: 中国矿业大学(北京)理学院;河北大学物理科学与技术学院
摘 要: 采用准分子激光器在10 Pa氩气环境中烧蚀单晶Si靶,用扫描电子显微镜(scanning electron microscope,SEM)观察沉积物的表面形貌,可以得到衬底上晶粒面密度及平均尺寸随靶距离变化的规律。然后利用气体分子运动论,建立激光等离子体膨胀模型,从碰撞的角度探索气相成核和晶粒生长机理,成功解释了实验结果,揭示了等离子体密度对晶核形成的重要作用。
关 键 词: 光学;脉冲激光烧蚀;晶粒生长;碰撞
Title: The dynamics research of nanometer�sized silicon crystallites prepared by excimer laser ablation
Author: LI Hongwei, SU Wei, TENG Aiping, WANG Yinglong
Organization: College of Sciences, China University of Mining & Technology;College of Physics Science & Technology, Hebei University
Abstract: In this experiment, nanometer�sized silicon crystallites were prepared by excimer laser ablation at the ambient pressure of 10 Pa of Ar gas. The surface of substrate was probed by scanning electron microscope and the law of surface density and grain size changing with the distance from the target was got. The damping inflated model of laser plasma was established by using the statistical physics, the mechanism of the nucleation in gas and grain growth from the angle of collision was explored, it successfully explains the experimental results and reveals the density of plasma plays a significant role in the process of the nucleation.
Key words: optics; pulse laser ablation; growth of crystalline particle; collision
发表期数: 2010年8月第15期
引用格式: 李红伟,苏威,滕爱萍,等. 脉冲激光烧蚀制备纳米Si晶粒的动力学研究[J]. 中国科技论文在线精品论文,2010,3(15):1572-1577.
 
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