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热处理对TiSixNy超硬涂层结构及性能的影响

发表时间:2011-05-15  浏览量:1157  下载量:444
全部作者: 陆永浩,王俊平,李明星,陶诗龙
作者单位: 北京科技大学国家材料服役安全科学中心;北京建筑工程学院理学院;长庆油田公司油气工艺技术研究院
摘 要: 采用四靶(2个Ti靶和2个Si靶)非平衡磁控溅射沉积工艺,在氮氩混合气氛和500℃基片温度下,通过调节Si靶溅射电流在M42钢基体上沉积得到了具有不同Si含量的TiSixNy硬质涂层。这些薄膜随后在500,600,700,800,900℃下进行真空热处理。使用X-射线衍射(X-ray diffraction,XRD)、微米硬度仪、划痕仪研究热处理对涂层的组织结构、力学性能和膜基附着力的影响。研究结果表明:900℃及以下温度真空热处理对薄膜的组织、力学性能等影响不大,但对钢基体的组织和性能则有较大的影响。随着真空退火温度的提高,薄膜附着力小幅增加后急剧减小,600℃时薄膜的附着力最大。摩擦实验表明:TiSixNy薄膜的摩擦系数随着Si含量的增加而略微下降,不同Si含量薄膜的摩擦系数介于0.352~0.404之间;900℃及以下温度真空热处理对薄膜的摩擦系数影响不大。
关 键 词: 材料物理与化学;TiSixNy;纳米复合;热处理;显微结构;附着力
Title: Effect of annealing treatment on the microstructure and properties of TiSixNy superhard coatings
Author: LU Yonghao, WANG Junping, LI Mingxing, TAO Shilong
Organization: National Center for Materials Service Safety, University of Science & Technology Beijing; School of Science, Beijing University of Civil Engineering and Architecture; Oil & Gas Technology Research Institute, Changqing Oilfield Company
Abstract: In this study, a series of TiSixNy superhard coatings with different Si contents were prepared on M42 steel substrates using 2 Ti and 2 Si targets by reactive magnetron sputtering at 500℃ in nitrogen-argon mixed atmosphere. These samples were subsequently vacuum-annealed at 500, 600, 700, 800 and 900℃, respectively. X-ray diffraction (XRD), microindenter and scratch tester were applied to investigate the microstructure, mechanical behaviors and adhesion property of as-deposited and annealed samples. The results indicated that annealing treatment below 900℃ played a little role in microstructure and mechanical behaviors of the coatings, however greatly affected the microstructure and mechanical behaviors of steel substrates. The film-substrate adhesive force was slightly increased, followed by abrupt decrease with increasing annealing temperature. Its value got to the maximum at 600℃. The friction coefficient was slightly decreased with increase of Si content. Its value varied in the range of 0.352-0.404. Annealing below 900℃ had less effect on the friction coefficient.
Key words: materials physics and chemistry; TiSixNy; nanocomposite; annealing; microstructure; adhesive force
发表期数: 2011年5月第9期
引用格式: 陆永浩,王俊平,李明星,等. 热处理对TiSixNy超硬涂层结构及性能的影响[J]. 中国科技论文在线精品论文,2011,4(9):791-797.
 
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