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铜离子注入LiNbO3的离子束增强刻蚀

发表时间:2012-08-15  浏览量:1240  下载量:346
全部作者: 王磊,项炳锡
作者单位: 山东大学物理学院
摘 要: 采用MeV铜离子注入的方法注入LiNbO3单晶样品,研究铜离子注入LiNbO3的增强刻蚀特性。利用湿法刻蚀、金相显微镜、扫描电子显微镜及台阶仪测量了刻蚀的深度、速度及表面形貌;铜离子注入LiNbO3的增强刻蚀深度可以用SRIM(Stopping and Range of Ions in Matter)软件进行估计,刻蚀速度在近表面区域变化很小;刻蚀后形成的表面光滑,刻蚀形成脊形结构的形状与刻蚀时间有一定关系。实验结果表明:铜离子的离子束增强刻蚀可以在LiNbO3表面形成脊形结构,这一性质可以用来制备LiNbO3脊形光波导。
关 键 词: 凝聚态物理;离子与固体的相互作用;离子注入光波导;LiNbO3;刻蚀;脊形结构
Title: Investigation of copper ion beam enhanced etching in lithium niobate crystal
Author: WANG Lei, XIANG Bingxi
Organization: School of Physics, Shandong University
Abstract: This paper is dedicated to the investigation of Cu ion beam enhanced etching in lithium niobate crystal. The lithium niobate crystal was implanted by 6 MeV Cu ions with a fluence of 5�014 ion/cm2. The etched depths versus etching time, the etching velocity and the surface topography after etching were characterized by wet etching and the following scanning electron microscope and profiler measurements. The ultimate etched depth can be pre-determined by the simulation of the Stopping and Range of Ions in Matter (SRIM) code. The velocity in the surface region is nearly invariable. The etched surface is smooth. The different etching time results in different shape of the etched ridge structure. The Cu ion beam enhanced etching can be used to fabricate ridge waveguide in lithium niobate crystal.
Key words: condensed matter physics; interactions between ions and solid materials; ion implanted optical waveguide; lithium niobate; etching; ridge structure
发表期数: 2012年8月第15期
引用格式: 王磊,项炳锡. 铜离子注入LiNbO3的离子束增强刻蚀[J]. 中国科技论文在线精品论文,2012,5(15):1449-1453.
 
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