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不同掺Na工艺对Cu(In,Ga)Se2薄膜电学、结构和形貌的影响
发表时间：2012-09-30 浏览量：1467 下载量：430
| 全部作者： | 何静婧，刘玮，李志国，孙云 |
| 作者单位： | 南开大学信息技术科学学院，天津市光电子薄膜器件与技术重点实验室 |
| 摘 要： | 在柔性衬底上生长Cu(In,Ga)Se2（CIGS）薄膜，Na的掺入会对薄膜特性有重要的改善作用，且不同的掺Na工艺会对薄膜产生不同的影响。实验中，采用低温三步法在柔性聚酰亚胺(polyimide, PI)衬底上沉积CIGS，并研究前掺Na和后掺Na 2种掺Na工艺对太阳能薄膜电池［CuInxGa(1-x)Se2，CIGS］薄膜电学、结构和形貌的影响。研究发现：当Na存在于CIGS薄膜生长过程中时，会影响In，Ga元素的扩散。X射线衍射（X-ray diffraction, XRD）测试发现：薄膜会产生明显的双峰劈裂现象，反映了薄膜中的两相分离。另外，Na的存在还会影响薄膜的生长过程，扫描电子显微镜（scanning electron microscopy，SEM）显示：薄膜的结晶质量会受到影响，造成薄膜晶粒细碎。 |
| 关 键 词： | 太阳能；太阳能薄膜电池；柔性衬底；低温沉积；Na掺杂 |
| Title： | Impact of different sodium incorporation methods on electrical, structural and micrograph properties of Cu(In,Ga)Se2 thin film |
| Author： | HE Jingjing, LIU Wei, LI Zhiguo, SUN Yun |
| Organization： | Tianjin Key Laboratory for Photoelectronic Thin Film Devices and Technology, College of Information Technical Science, Nankai University |
| Abstract： | Incorporation of sodium into Cu(In,Ga)Se2 (CIGS) thin films deposited on flexible substrate leads to a great improvement in the properties of CIGS. Different influences were found by using different sodium incorporation methods. In this work, CIGS was deposited on flexible polyimide (PI) substrate by three-stage process based on low-temperature deposition. The research focuses on the impact of two different sodium incorporation methods, deposition of a sodium compound precursor and post-deposition treatment of a sodium compound, on electrical, structural and micrograph properties of CIGS thin film. X-Ray diffraction (XRD) measurement shows that the interdiffusion of In-Ga is restrained, which exhibits a double-peak reflection pattern when sodium is available during the growth of CIGS. In addition, the growth of CIGS is affected due to sodium incorporation, which leads to a decreased grain size observed by means of scanning electron microscopy (SEM). |
| Key words： | solar energy; CuInxGa(1-x)Se2; flexible substrate; low-temperature deposition; sodium incorporation |
| 发表期数： | 2012年9月第18期 |
| 引用格式： | 何静婧，刘玮，李志国，等. 不同掺Na工艺对Cu(In,Ga)Se2薄膜电学、结构和形貌的影响[J]. 中国科技论文在线精品论文，2012，5（18）：1741-1744. |
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