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MeV氧离子注入Mg掺杂近化学剂量比LiNbO3制备平面光波导
发表时间：2013-02-15 浏览量：1571 下载量：417
| 全部作者： | 王磊，项炳锡 |
| 作者单位： | 山东大学物理学院 |
| 摘 要： | 掺Mg近化学计量比LiNbO3是一种具有优良非线性光学性质的人工晶体，离子注入是一种在普通LiNbO3晶体上制备光波导的有效手段。采用不同剂量4.5 MeV的氧离子注入Mg掺杂近化学计量比LiNbO3，利用棱镜耦合方法研究波导暗模特性，利用卢瑟福背散射/沟道技术测量离子注入在近表面区域产生的损伤，通过一系列退火处理研究形成的光波导的退火特性。结果表明：利用MeV的氧离子注入LiNbO3可以在掺Mg近化学计量比LiNbO3上形成光波导，所制备波导的厚度在微米量级，与SRIM (stopping and range of ious in matter)模拟的损伤深度在一个量级。因此，可以认为离子注入造成的损伤是形成光波导的原因。 |
| 关 键 词： | 凝聚态物理学；离子与固体相互作用；铌酸锂；离子注入；光波导 |
| Title： | Planar waveguides in magnesium-doped stoichiometric LiNbO3 formed by MeV oxygen ion implantations |
| Author： | WANG Lei, XIANG Bingxi |
| Organization： | School of Physics, Shandong University |
| Abstract： | The magnesium doped stiochiometric LiNbO3 is a man-made crystal with excellent nonlinear optical properties. The ion implantation is a powerful method to form guiding structure on lithium niobate crystal. The planar waveguides were formed in magnesium-doped stoichiometric LiNbO3 crystals by means of 4.5 MeV oxygen ion implantations with different doses. The dark mode spectra were measured using the prism coupling method. The Rutherford backscattering/channeling technique was used to investigate the damage on the near-surface region generated by the ion implantation. The annealing behaviors of the formed waveguides were characterized by a series of annealing treatments. The results showed that the ion implantation was an effective method to fabricate waveguide on magnesium-doped stoichiometric LiNbO3 crystal. The thickness of the formed waveguide was in microns, which was similar to the damage depth by stopping and range of ious in matter (SRIM) smulation. Therefore, the electronic energy depisition is found to be responsible for the formation of the waveguide. |
| Key words： | condensed matter physics; interactions between ions and solid materials; lithium niobate; ion implantation; waveguide |
| 发表期数： | 2013年2月第3期 |
| 引用格式： | 王磊，项炳锡. MeV氧离子注入Mg掺杂近化学剂量比LiNbO3制备平面光波导[J]. 中国科技论文在线精品论文，2013，6（3）：228-233. |
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