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叉指微悬臂梁光读出式热成像系统的光学原理分析

发表时间:2013-11-30  浏览量:923  下载量:290
全部作者: 刘明,董立泉,赵跃进,惠梅
作者单位: 北京理工大学光电学院
摘 要: 采用波动光学理论对叉指形微悬臂梁热成像系统光学读出部分的工作原理进行详细推导。其光学读出系统的设计目的是将微悬臂梁变形单元阵列在红外(infrared, IR)线热作用下产生的微小离面位移变化信号转化为像面上对应位置的光强度信号,以便用于图像采集和后续处理。在理论分析基础上提出对叉指单元光栅间平行度的要求,并改变叉指形微悬臂梁阵列的光栅参数以提高光能利用率的设计思想。
关 键 词: 测试技术与仪器;双材料悬臂梁;红外成像;光学读出;叉指形
Title: Optical theory of infrared imaging system based on interdigital micro-cantilever
Author: LIU Ming, DONG Liquan, ZHAO Yuejin, HUI Mei
Organization: School of Optoelectronics, Beijing Institute of Technology
Abstract: The working principle of the optical readout subsystem in an uncooled infrared (IR) imaging system based on interdigital micro-cantilevers is described by diffraction optics theory. The readout subsystem is designed to transform the signal from a slight displacement of each cantilever unit to the corresponding pixel�s intensity change on the output image and it can be captured by a camera. The parallel restrict for a pair of gratings in one cantilever unit is presented and the design idea of rectifying the parameters of gratings as well, which may bring a higher light-signal conversion efficiency.
Key words: measurement technology and instrumentation; bimaterial cantilevers; infrared imaging; optical readout; interdigital
发表期数: 2013年11月第22期
引用格式: 刘明,董立泉,赵跃进,等. 叉指微悬臂梁光读出式热成像系统的光学原理分析[J]. 中国科技论文在线精品论文,2013,6(22):2207-2215.
 
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