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磷化铟基无源脊波导

发表时间:2014-04-30  浏览量:1573  下载量:498
全部作者: 陈开胜,叶梦渊,陈彬,余宇,张新亮
作者单位: 华中科技大学武汉光电国家实验室
摘 要: 磷化铟(InP)基无源波导是光子集成的关键基础器件。研究在理论上分析了InP基无源脊波导的单模条件,得到该波导的截止特性。自行开发InP基器件工艺,如普通光刻、掩膜刻蚀、InP波导刻蚀等,并设计和制作了2.0 μm宽的无源单模脊波导和5.0 μm宽的无源多模脊波导;经实验测算,单模波导损耗约为1.3 dB/mm,多模波导损耗约为1.0 dB/mm. 同时,单模波导中被设计成锥形的输入、输出端能够作为模斑转换器,从而减少无源波导与光纤的耦合损耗。
关 键 词: 半导体器件与技术;光子集成;磷化铟;无源脊波导;模斑转换器
Title: Passive ridge waveguides in InP
Author: CHEN Kaisheng, YE Mengyuan, CHEN Bin, YU Yu, ZHANG Xinliang
Organization: Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology
Abstract: The passive waveguides of InP are the most important building block for photonic integration. The single mode conditions and cut-off characteristics of the passive surface ridge waveguide in InP were studied. And a 2.0 μm-wide single mode and a 5.0 μm-wide multi-mode passive surface ridge waveguides were designed using numerical simulation and fabricated using lithography and etching process. The propagation loss of the single mode waveguide was 1.3 dB/mm, while 1.0 dB/mm for the multi-mode waveguide. In addition, the input and output tapers were spot size converters to enable improved coupling to lensed fibers.
Key words: semiconductor devices and technology; photonic integration; InP; passive ridge waveguide; spot size converter
发表期数: 2014年4月第8期
引用格式: 陈开胜,叶梦渊,陈彬,等. 磷化铟基无源脊波导[J]. 中国科技论文在线精品论文,2014,7(8):772-775.
 
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