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基于蓝宝石衬底的Si纳米线NH3传感器

发表时间:2014-08-15  浏览量:1453  下载量:430
全部作者: 周畅,胡礼中,张贺秋,邱宇,陈剑,李立鹏
作者单位: 大连理工大学物理与光电工程学院
摘 要: 采用化学气相输运(chemical vapor transport, CVT)方法在蓝宝石衬底上制备了高密度的Si纳米线,通过扫描电子显微镜(scanning electron microscope, SEM)对其形貌进行表征。实验结果表明:这种Si纳米线具有类似于网状的形貌,其长度范围在微米量级,直径约为40~110 nm. 利用这种Si纳米线成功地制备了一种NH3传感器,并系统地研究了不同气体浓度下传感器的传感特性,发现其具有在10 s内快速恢复的优点。这种传感器的制作过程简单,成本低廉,在实际生产与应用中均有潜在价值。
关 键 词: 半导体物理学;Si纳米线;NH3传感器;化学气相输运
Title: NH3 gas sensor based on Si nanowires synthesized on the sapphire substrate
Author: ZHOU Chang, HU Lizhong, ZHANG Heqiu, QIU Yu, CHEN Jian, LI Lipeng
Organization: School of Physics and Optoelectronic Engineering, Dalian University of Technology
Abstract: In this study, Si nanowires were synthesized by chemical vapor transport(CVT) on the sapphire substrate, and their morphologies were analyzed by scanning electron microscope (SEM). The results showed that the morphology of Si nanowires was network-like. The length of the Si nanowires was in micrometers range. The diameter of the nanowires was in the range of 40 to 110 nm. A Si nanowires based NH3 gas sensor was prepared using a very simple on-chip fabrication method. And the sensing properties of the sensor were studied in different NH3 gas concentrations. Its advantage of quick recovery in less than 10 s was found. The simple fabrication and low cost of the sensor make it has potential value in practical production and application.
Key words: semiconductor physics; Si nanowires; NH3 gas sensor; chemical vapor transport
发表期数: 2014年8月第15期
引用格式: 周畅,胡礼中,张贺秋,等. 基于蓝宝石衬底的Si纳米线NH3传感器 [J]. 中国科技论文在线精品论文,2014,7(15):1567-1571.
 
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