您的位置:首页  > 论文页面

一种全柔性压力传感阵列的设计与制作

发表时间:2014-10-31  浏览量:1690  下载量:450
全部作者: 梅海霞,王睿,冯建超,张策,王志轩,候冰基,张彤
作者单位: 吉林大学电子科学与工程学院,集成光电子学国家重点联合实验室
摘 要: 设计了一种基于柔性衬底和柔性压敏材料的压力传感器阵列。该4×4的柔性阵列采用光刻工艺制备,尺寸为2.5 cm×2.5 cm,衬底为聚对苯二甲酸乙二醇/铟锡氧化物(PET/ITO)柔性基板,压敏材料为导电橡胶(CSA57-7RSC PCR Technical)。实验结果证明:该全柔性压力传感阵列在0~10 N的负载下呈现负压阻效应,具有高灵敏度和迅速响应恢复特性,能准确测知其感应到的力的大小和方位。该微型阵列可用于机器人仿生手领域。
关 键 词: 敏感电子学;全柔性;压力传感器;阵列
Title: Design and fabrication of an absolutely flexible pressure sensor array
Author: MEI Haixia, WANG Rui, FENG Jianchao, ZHANG Ce, WANG Zhixuan, HOU Bingji, ZHANG Tong
Organization: State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University
Abstract: An absolutely flexible pressure sensor array based on flexible substrate and flexible pressure-sensitive materials is designed. The 4� flexible sensors array is prepared by lithography process, the size is 2.5 cm�.5 cm, the flexible substrate is PET/ITO (polyethylene terephthalate/indium Tin oxides), and the pressure-sensitive material is conductive rubber (CSA57-7RSC PCR Technical). Experiments show that the absolutely flexible pressure sensor array presents negative pressure resistance effect under a loading from 0 to 10 N. It has high sensitivity and fast response features. The perceived size and azimuth of the external forces on the sensor array can be easily recognized. The micro array can be used for bionic robot hand.
Key words: sensitive electronics; absolutely flexible; pressure sensor; array
发表期数: 2014年10月第20期
引用格式: 梅海霞,王睿,冯建超,等. 一种全柔性压力传感阵列的设计与制作[J]. 中国科技论文在线精品论文,2014,7(20):1999-2002.
 
0 评论数 0
暂无评论
友情链接