您的位置:首页  > 论文页面

基于光谱共焦传感器的石英摆片厚度测量

发表时间:2015-03-31  浏览量:1563  下载量:546
全部作者: 刘雪原,钟志
作者单位: 哈尔滨工程大学信息与通信工程学院
摘 要: 为提高石英摆片厚度测量的精度和效率,提出一种利用光谱共焦传感器进行测量的非接触测量方法,并对该方法测量的不确定性进行了分析和实验。实验结果表明:该测量方法测量精度高,重复性好,可以实现石英摆片厚度的非接触精密测量。
关 键 词: 光电子学与激光技术;光谱共焦;石英摆片;厚度测量
Title: Measurement method for the thickness of quartz pendulous reed based on chromatic confocal sensor
Author: LIU Xueyuan,ZHONG Zhi
Organization: College of Information and Communication Engineering, Harbin Engineering University
Abstract: In order to improve the accuracy and efficiency of the measurement of quartz pendulous reed thickness, this paper proposed a non-contact measurement method using chromatic confocal sensor and analyzed the method. Experimental results show that the proposed method has good stability and high measurement accuracy, which can achieve precise non-contact measurement of quartz pendulous reed thickness.
Key words: optoelectronics and laser technology; chromatic confocal; quartz pendulous reed; thickness measurement
发表期数: 2015年3月第6期
引用格式: 刘雪原,钟志. 基于光谱共焦传感器的石英摆片厚度测量[J]. 中国科技论文在线精品论文,2015,8(6):610-613.
 
0 评论数 0
暂无评论
友情链接