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微米凹透镜超分辨成像性质研究

发表时间:2016-10-15  浏览量:1572  下载量:536
全部作者: 侯静蕾,叶永红,郭明磊,杜滨涛
作者单位: 南京师范大学物理科学与技术学院
摘 要: 深入研究不同尺寸基于SU-8光刻胶微米凹透镜(micro concave lenses,MCL)的超分辨能力。实验中将半浸没在SU-8光刻胶中直径为3.35~15.50 μm的SiO2微球利用氢氟酸(HF)腐蚀掉之后便形成基于SU-8光刻胶的MCL. 研究发现,MCL能够分辨出直径为305 nm的微球阵列,由直径4.87 μm和7.27 μm微球制备的MCL成像效果好于其他几种。更进一步的实验证实,甩胶在样品表面的SU-8光刻胶的厚度d在MCL成像作用中起了非常重要的作用。
关 键 词: 光学;微米凹透镜;超分辨;光刻胶;厚度d
Title: Optical super-resolution imaging properties of micro concave lenses
Author: HOU Jinglei, YE Yonghong, GUO Minglei, DU Bintao
Organization: School of Physics and Technology, Nanjing Normal University
Abstract: The super-resolution capability of micro concave lenses (MCL) based on SU-8 photoresist with different sizes has been deeply researched. In the experiment, after removing the silica microspheres with HF which are semi-immersed in SU-8 photoresist, the MCL with different sizes have been formed. Here, the diameter of these microspheres is in the range of 3.35-15.50 μm. The results showed that the MCL could resolve 305 nm nanospheres array. We found that the imaging quality of the MCL fabricated from 4.87 μm or 7.27 μm silica microspheres semi-immersed in SU-8 photoresist was better than several other MCL. And that the thickness d of SU-8 photoresist on the sample surface which was important for MCL have been further confirmed.
Key words: optics; micro concave lens; super-resolution; photoresist; thickness d
发表期数: 2016年10月第19期
引用格式: 侯静蕾,叶永红,郭明磊,等. 微米凹透镜超分辨成像性质研究[J]. 中国科技论文在线精品论文,2016,9(19):1995-2002.
 
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