您的位置:首页  > 论文页面

基于硅纳米结构膜的酒精传感器

发表时间:2016-10-15  浏览量:1517  下载量:482
全部作者: 吕扬,张贺秋,胡礼中
作者单位: 大连理工大学物理与光电工程学院
摘 要: 采用化学气相输运(chemical vapor transport,CVT)方法制备硅纳米结构膜,并通过扫描电子显微镜(scanning electron microscope,SEM)对其形貌进行表征。结果表明,这种硅纳米结构膜由交织在一起的硅纳米棒构成,纳米棒长度范围在微米量级,直径约为100 nm. 利用这种硅纳米结构膜成功制备了一种酒精传感器,并研究不同浓度酒精气氛中传感器的传感特性,发现其具有在1 s内快速恢复的优点。这种传感器制作过程简单、成本低廉,在实际应用中具有潜在价值。
关 键 词: 半导体物理学;硅纳米结构膜;酒精传感器;化学气相输运;传感特性
Title: Ethanol gas sensor based on silicon nanostructure films
Author: LÜ Yang, ZHANG Heqiu, HU Lizhong
Organization: School of Physics and Optoelectronic Engineering, Dalian University of Technology
Abstract: In this study, silicon nanostructure films were synthesized by chemical vapor transport (CVT), and their morphologies were analyzed by scanning electron microscope (SEM). The experimental results showed that the silicon nanostructure films were made up of intertwined silicon nanorods. The length of the nanorods was in the micron range, and the diameter of nanorods was about 100 nm. On this basis, we prepared an ethanol gas sensor using silicon nanostructure film, and studied its sensing characteristics to different concentrations of alcohol gas. We found that the recovery time of the sensor may be less than 1 s. What’s more, this kind of sensor is simple in fabrication process, cheap and valuable in practical application.
Key words: semiconductor physics; silicon nanostructure film; ethanol gas sensor; chemical vapor transport; sensing characteristics
发表期数: 2016年10月第19期
引用格式: 吕扬,张贺秋,胡礼中. 基于硅纳米结构膜的酒精传感器[J]. 中国科技论文在线精品论文,2016,9(19):2011-2015.
 
0 评论数 0
暂无评论
友情链接