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MEMS微型富集器的制备及其对有机硫气体的吸附性能研究

发表时间:2017-10-31  浏览量:1322  下载量:246
全部作者: 李亚茹,袁晓敏,吴玉明,杜晓松
作者单位: 电子科技大学光电信息学院
摘 要: 采用微机电系统(micro-electro-mechanical system,MEMS)工艺完成了三维格栅分流型富集器的微结构加工,然后分别填充碳纳米管和Tenax-TA作为吸附材料以进行吸附性能的对比。测试结果表明,碳纳米管的吸附性能比Tenax-TA材料好。对于5 mg/m3的二硫化碳和甲硫醚,填充碳纳米管的富集器富集80 s后,富集率分别为18.17和15.57.
关 键 词: 电气工程其他学科;富集率;微机电系统;有机硫气体;富集器
Title: Preparation of MEMS micro-preconcentrator and its adsorption performance for organic sulfur gas
Author: LI Yaru, YUAN Xiaomin, WU Yuming, DU Xiaosong
Organization: School of Optoelectronic Information, University of Electronic Science and Technology of China
Abstract: In this paper, micro-electro-mechanical system (MEMS) technology is used for the microfabrication of the three-dimensional grating type preconcentrator. We add carbon nanotube and Tenax-TA as filler of the three-dimensional preconcentrator structure, respectively, to conduct their adsorption performances. Results show that the adsorption performance of carbon nanotube is better than Tenax-TA. After 80 s enrichment for carbon disulfide and methyl sulfide at concentration of 5 mg/m3, the concentrator rate is 18.17 and 15.57, respectively.
Key words: other subjects of electrical engineering; concentrator rate; micro-electro-mechanical system; organic sulfur gas; preconcentrator
发表期数: 2017年10月第20期
引用格式: 李亚茹,袁晓敏,吴玉明,等. MEMS微型富集器的制备及其对有机硫气体的吸附性能研究[J]. 中国科技论文在线精品论文,2017,10(20):2272-2278.
 
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