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应用于近红外微型光谱仪的电磁式MOEMS 扫描光栅微镜的分析与仿真

发表时间:2018-08-31  浏览量:115  下载量:29
全部作者: 唐杰,温志渝
作者单位: 重庆大学光电工程学院,微系统研究中心,新型微纳器件与系统技术国防重点学科实验室
摘 要: 研究分析了电磁式微光机电系统(micro-opto-electro-mechanical system,MOEMS)扫描光栅微镜的工作原理。基于有限元分析软件建模完成了电磁式MOEMS扫描光栅微镜的电磁-结构耦合仿真分析。仿真结果表明,电磁式MOEMS扫描光栅微镜的谐振频率为560.12 Hz,最大扭转角度达5.54°;开环情况下,扫描光栅微镜在起振过程中过冲仅为9.57%.
关 键 词: 半导体技术;微光机电系统扫描光栅微镜;微型光谱仪;有限元分析;电磁-结构耦合
Title: Analysis and simulation of MOEMS electromagnetic scanning grating mirror for NIR micro-spectrometer
Author: TANG Jie, WEN Zhiyu
Organization: Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Microsystem Research Center, College of Optoelectronic Engineering, Chongqing University
Abstract: The operation principle and device configuration of micro-opto-electro-mechanical system (MOEMS) electromegnetic scanning grating mirror (SGM) is analyzed. The electromagnet-mechanical coupling simulation analysis of MOEMS electromagnetic SGM is completed based on the finite element analysis (FEA) software. The simulation results show that the resonant frequency of MOEMS electromagnetic SGM is 560.12 Hz, and the maximum torsion angle is 5.54°. In open-loop state, only 9.57% overshoot has arisen in starting of vibration.
Key words: semiconductor technology; micro-opto-electro-mechanical system scanning grating mirror; micro-spectrometer; finite element analysis; electromagnet-mechanical coupling
发表期数: 2018年8月第16期
引用格式: 唐杰,温志渝. 应用于近红外微型光谱仪的电磁式MOEMS 扫描光栅微镜的分析与仿真[J]. 中国科技论文在线精品论文,2018,11(16):1677-1685.
 
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