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考虑瓶颈设备维修的半导体投片计划优化研究
发表时间：2021-01-08 浏览量：762 下载量：115
| 全部作者： | 魏梦如，黄其煜 |
| 作者单位： | 上海交通大学国家示范性微纳电子学院；上海华力微电子有限公司 |
| 摘 要： | 针对现阶段产品多样性高、生产线波动大情形下的生产投片计划问题，综合考虑多产品、多周期、瓶颈设备维修等因素以构建相应的线性规划数学模型，并通过ILOG CPLEX软件仿真求解模型。仿真结果表明：设备维修等因素通常会导致瓶颈设备的转移，生产计划的制定应综合考虑多个瓶颈设备群的产能随时间的变化情形；企业进行投片计划决策时，如果过度关注优化生产周期（cycle time，CT）而不断降低在制品（work in process，WIP）库存水平，将导致延期交付成本激增，故在制定投片计划时应综合考虑多个生产目标之间的相互影响。 |
| 关 键 词： | 半导体技术；投片计划；线性规划；生产周期 |
| Title： | Optimization of wafer start plan considering bottleneck equipment maintenance plan |
| Author： | WEI Mengru, HUANG Qiyu |
| Organization： | School of Microelectronics, Shanghai Jiao Tong University; Shanghai Huali Microelectronics Corporation |
| Abstract： | For the wafer start planning problem under the condition of high product diversity and high fluctuation of production line in the current stage, the multi-product, multi-period, the bottleneck equipment maintenance and other factors are considered to construct the corresponding linear programming mathematical model, and to simulate and solve the model by ILOG CPLEX software. The simulation results show that the equipment maintenance and other factors usually lead to the transfer of bottleneck equipment. For the production plan, the changes in the production capacity of multiple bottleneck equipment groups over time should be comprehensively considered. When the enterprise makes a wafer start plan decision, if it pays too much attention to optimizing the production cycle time (CT) and continuously reducing the work in process (WIP) inventory level, it will lead to a surge in delayed delivery costs. Therefore, the interaction among multiple production targets should be taken into consideration when making wafer start plan. |
| Key words： | semiconductor technology; wafer start plan; linear programming; cycle time |
| 发表期数： | 2020年12月第4期 |
| 引用格式： | 魏梦如，黄其煜. 考虑瓶颈设备维修的半导体投片计划优化研究[J]. 中国科技论文在线精品论文，2020，13（4）：473-481. |
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